Beta This is a new way of showing guidance - your feedback will help us improve it.

Microelectronics

This series of information sheets will help those working with microelectronics to comply with their duties under the Control of Substances Hazardous to Health Regulations 2002 (as amended) to control exposure to hazardous substances and protect workers' health.

Microelectronics [MC]

MC0: Advice for managers

Advice for managersThis information will help managers to comply with the Control of Substances Hazardous to Health Regulations 2002 (COSHH), as amended, to control exposure and protect workers' health.

MC1: Wet etch processing

Wet etch processingThis sheet describes good practice using containment where possible, or engineering control (local extraction or an extracted booth). It covers the points you need to follow to reduce exposure to an adequate level. It is important to follow all the points, or use equally effective measures.

Related items

MC2: Chemical Vapour Deposition (CVD)

Chemical Vapour Deposition (CVD)This sheet describes good practice using containment, with extraction for product removal, and covers the points you need to follow to reduce exposure to an adequate level. It covers daily and weekly routine tasks of operation and maintenance. It does not cover major maintenance tasks or decommissioning of used equipment. It is important to follow all the points on the sheet, or use equally effective measures.

Related items

MC3: Dry etch processing

Dry etch processingThis sheet describes good practice using containment, with extraction for product removal, and covers the points you need to follow to reduce exposure to an adequate level. It covers daily and weekly routine tasks of operation and maintenance. It does not cover major maintenance tasks or decommissioning of used equipment. It is important to follow all the points on the sheet, or use equally effective measures.

Related items

MC4: Molecular beam epitaxy

Molecular beam epitaxyThis sheet describes good practice using containment, with extraction for product removal, and covers the points you need to follow to reduce exposure to an adequate level. It covers daily and weekly routine tasks of operation and maintenance. It does not cover major maintenance tasks or decommissioning of used equipment. It is important to follow all the points on the sheet, or use equally effective measures.

Related items

MC5: Photolithography processing

Photolithography processingThis sheet describes good practice using containment, with extraction for product removal, and covers the points you need to follow to reduce exposure to an adequate level. It covers daily and weekly routine tasks of operation and maintenance. It does not cover major maintenance tasks or decommissioning of used equipment. It is important to follow all the points on the sheet, or use equally effective measures.

Related items

MC6: Ion implantation

Ion implantationThis sheet describes good practice using containment, with extraction, and covers the points you need to follow to reduce exposure to an adequate level. It is important to follow all the points on the sheet, or use equally effective measures.

Related items

2020-07-06